Unity Web Player fails to install

r67210.

Unity Web Player can be downloaded from http://unity3d.com/webplayer (the current one reports version 5.0.1.0 - in sync with current Unity release 5.0.1)
An example site using the plugin: https://dl.dropboxusercontent.com/u/883485/UnityPhysicsTest/UnityPhysicsTest.html

Currently it doesn't seem possible to install Unity Web Player even though it is able to run on Win2k3 SP1. Installation wizard copies all files except for Uninstall.exe and says "Setup was not completed successfully".
Attaching debuglog and the installer log. It also happens on English ROS install.